The monitoring of superprecision

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The monitoring program of superprecision assured the exterior quality of the stability of craft and workpiece and precision. Reflector, monitor or diffractive optics yuan the quality of the microscopical and tectonic plastic film that place of parts of an apparatus uses basically is had the effect that exceeds mould of narrow face figuration, what these moulds are noting model or be used at the product in hot-working process is duplicate. Use the monocrystal diamond cutting tool that has blade of cutting of formulary geometry appearance, undertake to the structure of mould of this kind of nonferrous metal dig is cut, turning and milling treatment. This kind of handling time that transcends accurate cutting treatment often should last a few days, be as long as even a few weeks, achieve several square metre in order to come true to these exterior areas compressed or columned workpiece undertakes the structure is machined. The craft stability that has constant to decide exterior quality to ensure is affected by tatty of diamond cutting tool, this kind wears away to affect the precision of structural geometry appearance directly not only, also can affect its surface precision. Current, just machine the ability after flow thoroughly to be able to be opposite in the figuration mould of attaint undertakes differentiating, this causes the reject cost with huge generation, special to small and medium sized business, this often makes they achieve finance affairs to bear the limit of ability. Creating the figuration pattern that is used at producing miniature film structure or video is long the monocrystal diamond cutting tool that complex process makes appliance has blade of cutting of formulary geometry appearance, undertake to the structure of mould of this kind of nonferrous metal dig is cut, turning and milling treatment. This kind of handling time that transcends accurate cutting treatment often should last a few days, be as long as even a few weeks, achieve several square metre in order to come true to these exterior areas compressed or columned workpiece undertakes the structure is machined. The craft stability that has constant to decide exterior quality to ensure is affected by tatty of diamond cutting tool, this kind wears away to affect the precision of structural geometry appearance directly not only, also can affect its surface precision. Current, just machine the ability after flow thoroughly to be able to be opposite in the figuration mould of attaint undertakes differentiating, this causes the reject cost with huge generation, special to small and medium sized business, this often makes they achieve finance affairs to bear the limit of ability. Repeat precision to achieve 200nm or institute of technology of smaller Frauenhof production (IPT) for diamond turning and auger cut and dig cut treatment to develop applicable craft monitoring and automation plan, this kind of plan can implement complete automation change cutting tool and the monitoring that mark wears away to diamond in machining a process. Such, very tall craft stability and balanced exterior mass still are reached in can ensuring in what be as long as several days cutting is machined. The commonly used accurate outfit that is 2~5mm with the precision range that uses at present places what the technology differs is, the 200nm that new plan can achieve place of optical production technology to ask or taller repeat precision. Pass installation additional package, can discern completely automatically blade of cutting tool cutting is in inferior the attaint circumstance of micron limits, can change below essential condition tatty cutting tool, and catch with inferior the positional error that because change a knife,the precision of micron is measured and causes, and control equipment of machine of have the aid of corrects his. At present manufacturing technology institute has been in jacket of a machine tool had these add package, designing the 2nd. Manufacturing technology institute made center of an UHM superprecision, the combination that the optical surface that this center can pass cutting tool of use monocrystal diamond to achieve 1m2 to the area has turning, milling and dig are cut is machined (graph 1) . This institute cooperates with the associate of industrial group again the design that had the 2nd machine tool, the work of roller canister state that has optical surface quality with what will machine a diameter to amount to 600mm, length to amount to 2000mm. Graph the 1 turning that can undertake exceeding nicety to workpiece on this machining center, milling and dig are cut wait for combination to machined these two machines to deploy automation cutting tool to change system, this system by the CCD of a high resolution (the computer controls an amount) camera uses at changing a knife with turn tower or composition of robot of arm of a music. Undertake machining to workpiece on these machines, the often wants continuance number week consequently formerly time with cutting quantity and because superprecision technology is medium very little feed, because this meeting produces the cutting tool of advance gradually type,wear away. The point of a knife that is without cutting tool of diamond of deviation ground enlarge is passed use a Sony - HRC camera can obtain 1024 × 768 like element (Pixel) single width dimension is 4.

65 × 4.

The photograph of 65 Mm. It is OK that the camera lens in can magnifying the remote control of 10 times is opposite is used on camera one gets when focusing distance is 48mm 0.

× of 49 Mm 0.

The effective eye shot of 37 Mm, can undertake an analysis to diamond point of a knife thereby. Because camera lens can be without deviation ground enlarge, one resembled element onefoldly be being mirrorred 4.

65mm × 4.

The dimension of 65mm, because this achieved optics distinguishable spent maximum. Be through putting opposite camera is remote control likewise the glow diode in be opposite (LED) can increase the speed inside eye shot. The effect that does not suffer contamination and environmental element to be in treatment (graph 2) , whole apparatus installation is inside the housing with a compact structure that carries over cap. In addition, housing can be spent freely in 4 undertake directional, so that make,the error of formation of a imagine in optical light path is decreased the smallest. Graph the cutting tool that the effect that 2 optical in machining a process cutting tool measure a station to be able to be used at preventing pollution and outside ambient differs twice changes systematic cutting tool changes device has two kinds of different systems. One contains pneumatic clamp and the 6 axes robot of the electric spiral unit of tool carrier of diamond of OK and fixed Posalux can start cutting tool library, so that put down and take tatty cutting tool,give new cutting tool. On the tool carrier that can choose to hold diamond clip to cut treatment or main shaft of high speed cutting in a dig next, it is to change not only cutting tool, it is to measure the character that decides diamond point of a knife more, the geometry that so that secure the main shaft of bearing,decides in locally. The repetition that main shaft secures the definition that place of new to changing cutting tool reachs precision has conclusive sense. The adapter of authority of Posalux diamond tool that through using oneself design, the precision that hold clip can reach micron level, but the requirement that still cannot achieve precision so only, still need to have serious fixed position then. As replacement scheme, institute of Frauenhof production technology (IPT) developed a cutting tool to turn tower, be in the installation after it is integrated exceed accurate lathe to go up. And normally what treatment of high speed cutting differs is, to turn in cutting tool Daneibuke repeats the ground and height packs clip cutting tool accurately, used special comfortable the HSK 25 unit that distribute, so that be between cutting tool and machine tool,found an interface (join is nodded) . Use HSK device can ensure the outfit that obtains the pure machinery that is as high as 500nm below the case that has very tall tigidity places precision. And through additional integrated fixed bolt can prevent this plant rotate (graph 3) . The interior design with HSK special clamping apparatus is to be used technically at holding power of cutting tool of 6 Mm of × of clip 6, this is the cutting tool power that a kind of typical ground uses at cutting of diamond cutting tool. Graph 3 measurement unit are used at ensuring changing of the cutting tool of precision monocrystal diamond that accept rice level reachs when cutting tool wearing away appear randomly, the series test that passes experience sex well and truly will foreknow. Wear in contain especially the dig that structure of miniature of latent capacity of tremendous cost effectiveness, large area, surface machines cuts treatment in the process, can appear suddenly sometimes cutting tool ruptures to make whole workpiece discards as useless thereby. Measuring a station to undertake examining to achieve the high quality of exterior precision and figuration precision respect to assure regularly, after round of milling or dig cut treatment to end, want to suspend machining by formulary time-interval, send optics to measure a station to undertake detecting diamond cutting tool. The CCD camera that uses high resolution has identification to the state of blade of cutting tool cutting, at the same time affirmatory point of a knife is in the relative position that is standard world coordinate system with camera. In predefine wear away on the foundation of mark, the analytic software of camera is OK the program that oneself decide to whether need to start cutting tool to change, whether can affirmatory perhaps cutting tool still satisfy the quality that continues to machine next to ask. Change in need below the circumstance of cutting tool, the robot takes out cutting tool from inside the clamping apparatus of the machine tool, put its in cutting tool library, next a new cutting tool from same a cutting tool library is medium take out, secure its the clamping apparatus in the machine tool to go up. The control that passes a robot then sends optics to measure a station cutting tool afresh, so that be opposite,the new old position of diamond point of a knife undertakes comparative, computation gives a group of corrective data, the control that passes this group of data interface of a series to transmit a machine goes in the system. In the control system of the machine, will accessary referenced coordinate system has shift, so that be in same locally with be less than the repetition of 500nm precision uses a job of new cutting tool proceed. The precision of whole system basically depends on optics measures a station precision. The repetition besides camera and software of evaluation algorithm systems analysis besides precision, the mistake of smooth to machine coordinate system road is directional what may bring about geometrical dimension is lack fidelity and the wrong explanation of necessary corrective numerical value. But have the aid of a referenced sample book that oneself develop and an accessary calibration program can have camera essence of life decides to, error of angle the rest is only 0.

05 ° . The repetition of the place of rotor of radial main shaft that undertakes to the system with trial work appraisal is measured when place when precision is 3mm, corresponding error is less than 5nm, this is less than the resolution precision of CCD camera apparently. On the foundation of academic observation, total error is in 0.

Under 5mm. To have identification to the system, make the trial work that gave to have linear structure. Undertake changing to cutting tool after fiducial chamfer decides milling. Pure because change the account of the knife,the likelihood is measured in X direction piece 2.

The deflection of 3mm, measure in Z direction piece 4.

The deflection of 3mm. In the control system that accessary corrective value will transmit a machine automatically, so that be below the circumstance of same slot pitch and same feed deepness,continue the chamfer with other milling. Be opposite through using surface roughness of a Taylor-Hobson to check instrument structural deepness and the measurement that the structure is apart from, the horizontal way deviation that can measure a perpendicular direction deviation as a result of the 133nm that change a knife and causes and 178nm. On the passive and directional foundation of the component, cutting tool of the getatable before gets data exceeds order apparently changes systematic precision. The numerical value that reachs now is potential still again a few lower mix by passive preliminary adjustments section of active measure the base that reachs the position to mixed plan newly of corrective composition to make the complete automation plan that adopts cutting to machine technique to undertake exceeding narrow face machining first. The advantage of this plan depends on, be in and the machine exceeds cutting tool of accurate diamond cutting integratedly to character determines and change on systematic foundation, pass in process in inferior label to wearing away inside micron limits of width determine the monitoring that realized pair of cutting blade states, undertaking changing compensating to cutting tool with 200nm or taller precision when necessary. The method of the fixed air bearing main shaft in experimenting through clean technology and improvement, these numerical value still can be reduced. Frauenhof produces technical institute (IPT) the figuration mould of the complex large area that machine tool system can provide industrial group and scientific research bound to be used at making to have optical surface quality. This research work is in great project (Projekt Gross-Mikro, mark 13525 N) undertake inside frame, study federation through German industry (AiF) got German federal economy and technical department (BMWi) financing commitment, and got the support of network of European Excellence 4M. CNC Milling CNC Machining